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Engineering (R0) eBook Series

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  • Nanopositioning Technologies

    Fundamentals and Applications

    Edited by Changhai Ru, Xinyu Liu, Yu Sun ...
    Series series Engineering (R0)
    This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies and control methods for nanopositioning. This is an ideal book for mechanical and electrical ... Read more

    $89.09 USD