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  • Nanofabrication

    Techniques and Principles

    Edited by Maria Stepanova, Steven Dew ...
    Series series Chemistry and Material Science (R0)
    Intended to update scientists and engineers on the current state of the art in a variety of key techniques used extensively in the fabrication of structures at the nanoscale. The present work covers the essential technologies for creating sub 25 nm features lithographically, depositing layers with nanometer control, and etching patterns and structures at the nanoscale. A distinguishing feature of ... Read more

    $143.09 USD