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  • Springer Handbook of Aerogels

    Series series Chemistry and Material Science (R0)
    This indispensable handbook provides comprehensive coverage of the current state-of-the-art in inorganic, organic, and composite aerogels – from synthesis and characterization to cutting-edge applications and their potential market impact. Built upon Springer’s successful Aerogels Handbook published in 2011, this handbook features extensive revisions and timely updates, reflecting the changes in ... Read more

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  • Advances in Chemical Mechanical Planarization (CMP)

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    Series series Woodhead Publishing Series in Electronic and Optical Materials
    Advances in Chemical Mechanical Planarization (CMP), Second Edition provides the latest information on a mainstream process that is critical for high-volume, high-yield semiconductor manufacturing, and even more so as device dimensions continue to shrink. The second edition includes the recent advances of CMP and its emerging materials, methods, and applications, including coverage of post-CMP ... Read more

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  • Advances in Chemical Mechanical Planarization (CMP)

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    Advances in Chemical Mechanical Planarization (CMP) provides the latest information on a mainstream process that is critical for high-volume, high-yield semiconductor manufacturing, and even more so as device dimensions continue to shrink. The technology has grown to encompass the removal and planarization of multiple metal and dielectric materials and layers both at the device and the ... Read more

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