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  • Flash Lamp Annealing

    From Basics to Applications

    by Lars Rebohle, Slawomir Prucnal, Denise Reichel ...
    Series series Physics and Astronomy (R0)
    This book provides a comprehensive survey of the technology of flash lamp annealing (FLA) for thermal processing of semiconductors. It gives a detailed introduction to the FLA technology and its physical background. Advantages, drawbacks and process issues are addressed in detail and allow the reader to properly plan and perform their own thermal processing. Moreover, this books gives a broad ... Read more

    $116.09 USD